Issued Patents 2022
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11502478 | Laser apparatus, laser apparatus management system, and laser apparatus management method | Hiroyuki Masuda | 2022-11-15 |
| 11477877 | Laser apparatus for generating extreme ultraviolet light | Hitoshi Nagano, Yasunori Wada, Tatsuya Yanagida | 2022-10-18 |
| 11465233 | Laser processing system and laser processing method | Kouji Kakizaki | 2022-10-11 |
| 11469568 | Laser apparatus and laser processing system | Kouji Kakizaki | 2022-10-11 |
| 11451003 | Laser gas regenerating apparatus and electronic device manufacturing method | Hiroaki TSUSHIMA, Satoshi Tanaka, Yousuke FUJIMAKI, Takeshi Asayama | 2022-09-20 |
| 11353857 | Data analyzer, semiconductor manufacturing system, data analysis method, and semiconductor manufacturing method | Yutaka Igarashi, Yuji MINEGISHI | 2022-06-07 |
| 11353801 | Maintenance management method for lithography system, maintenance management apparatus, and computer readable medium | Kunihiko ABE, Yuji MINEGISHI | 2022-06-07 |
| 11271360 | Wavelength converter | Atsushi Fuchimukai, Yoichi Sasaki | 2022-03-08 |
| 11264773 | Laser apparatus and method for manufacturing optical element | Daisuke TEI | 2022-03-01 |
| 11217962 | Laser system | Masaki Arakawa | 2022-01-04 |