Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11353801 | Maintenance management method for lithography system, maintenance management apparatus, and computer readable medium | Kunihiko ABE, Osamu Wakabayashi | 2022-06-07 |
| 11353857 | Data analyzer, semiconductor manufacturing system, data analysis method, and semiconductor manufacturing method | Yutaka Igarashi, Osamu Wakabayashi | 2022-06-07 |