Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11353801 | Maintenance management method for lithography system, maintenance management apparatus, and computer readable medium | Yuji MINEGISHI, Osamu Wakabayashi | 2022-06-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11353801 | Maintenance management method for lithography system, maintenance management apparatus, and computer readable medium | Yuji MINEGISHI, Osamu Wakabayashi | 2022-06-07 |