Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11477877 | Laser apparatus for generating extreme ultraviolet light | Hitoshi Nagano, Yasunori Wada, Osamu Wakabayashi | 2022-10-18 |
| 11226565 | Extreme ultraviolet light generating system and electronic device manufacturing method | — | 2022-01-18 |