Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11477877 | Laser apparatus for generating extreme ultraviolet light | Hitoshi Nagano, Tatsuya Yanagida, Osamu Wakabayashi | 2022-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11477877 | Laser apparatus for generating extreme ultraviolet light | Hitoshi Nagano, Tatsuya Yanagida, Osamu Wakabayashi | 2022-10-18 |