Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11451003 | Laser gas regenerating apparatus and electronic device manufacturing method | Hiroaki TSUSHIMA, Satoshi Tanaka, Yousuke FUJIMAKI, Osamu Wakabayashi | 2022-09-20 |
| 11239625 | Laser apparatus including gas supply device and exhausting device | — | 2022-02-01 |