Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11448977 | Gas distribution plate with UV blocker at the center | Kartik Ramaswamy, Yang Yang | 2022-09-20 |
| 11415538 | Capacitive sensor housing for chamber condition monitoring | Yaoling Pan, Patrick Tae, Leonard Tedeschi, Daniel T. McCormick | 2022-08-16 |
| 11387135 | Conductive wafer lift pin o-ring gripper with resistor | Roberto Cesar Cotlear | 2022-07-12 |
| 11264252 | Chamber lid with integrated heater | Jeffrey Ludwig, Benjamin Schwarz, Roberto Cesar Cotlear | 2022-03-01 |