Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11415538 | Capacitive sensor housing for chamber condition monitoring | Yaoling Pan, Patrick Tae, Michael D. Willwerth, Daniel T. McCormick | 2022-08-16 |
| 11348846 | Wafer processing tool having a micro sensor | — | 2022-05-31 |