Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11415538 | Capacitive sensor housing for chamber condition monitoring | Yaoling Pan, Patrick Tae, Leonard Tedeschi, Michael D. Willwerth | 2022-08-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11415538 | Capacitive sensor housing for chamber condition monitoring | Yaoling Pan, Patrick Tae, Leonard Tedeschi, Michael D. Willwerth | 2022-08-16 |