Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387135 | Conductive wafer lift pin o-ring gripper with resistor | Michael D. Willwerth | 2022-07-12 |
| 11264252 | Chamber lid with integrated heater | Michael D. Willwerth, Jeffrey Ludwig, Benjamin Schwarz | 2022-03-01 |