Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201050 | Substrate processing method, recording medium and substrate processing apparatus | Itaru Kanno, Hiromi Kiyose, Gentaro Goshi, Naohiko Hamamura, Takuro Masuzumi +2 more | 2021-12-14 |
| 10916440 | Process and apparatus for processing a nitride structure without silica deposition | Derek Bassett, Wallace P. Printz, Antonio Luis Pacheco Rotondaro, Takahiro Furukawa | 2021-02-09 |