Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10916440 | Process and apparatus for processing a nitride structure without silica deposition | Derek Bassett, Antonio Luis Pacheco Rotondaro, Teruomi Minami, Takahiro Furukawa | 2021-02-09 |