TF

Takahiro Furukawa

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
Overall (2021): #243,355 of 548,734Top 45%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10916440 Process and apparatus for processing a nitride structure without silica deposition Derek Bassett, Wallace P. Printz, Antonio Luis Pacheco Rotondaro, Teruomi Minami 2021-02-09