Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10916440 | Process and apparatus for processing a nitride structure without silica deposition | Wallace P. Printz, Antonio Luis Pacheco Rotondaro, Teruomi Minami, Takahiro Furukawa | 2021-02-09 |
| 10886290 | Etching of silicon nitride and silica deposition control in 3D NAND structures | Antonio Luis Pacheco Rotondaro, Ihsan Simms, Trace Hurd | 2021-01-05 |