Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201050 | Substrate processing method, recording medium and substrate processing apparatus | Itaru Kanno, Hiromi Kiyose, Naohiko Hamamura, Takuro Masuzumi, Kenji Sekiguchi +2 more | 2021-12-14 |
| 11133176 | Substrate processing method, recording medium and substrate processing system | Kento Tsukano, Takuro Masuzumi, Hiromi Kiyose, Shogo Fukui | 2021-09-28 |
| 10998186 | Substrate processing apparatus, substrate processing method, and storage medium | Keisuke Egashira | 2021-05-04 |
| 10950465 | Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatus | Shotaro Kitayama, Hiroki Ohno, Keisuke Egashira, Yosuke Kawabuchi, Hiroshi Marumoto +3 more | 2021-03-16 |