Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10950465 | Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatus | Shotaro Kitayama, Gentaro Goshi, Keisuke Egashira, Yosuke Kawabuchi, Hiroshi Marumoto +3 more | 2021-03-16 |
| 10923368 | Substrate processing apparatus, substrate processing method, and storage medium | Takao Inada, Hisashi Kawano | 2021-02-16 |