Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11087992 | Substrate processing method and substrate processing apparatus | Tsukasa Hirayama, Hironobu Hyakutake, Kazuya Koyama, Hisashi Kawano | 2021-08-10 |
| 11075096 | Substrate processing apparatus | Hironobu Hyakutake, Hisashi Kawano | 2021-07-27 |
| 10923368 | Substrate processing apparatus, substrate processing method, and storage medium | Hisashi Kawano, Hiroki Ohno | 2021-02-16 |