Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11087992 | Substrate processing method and substrate processing apparatus | Takao Inada, Hironobu Hyakutake, Kazuya Koyama, Hisashi Kawano | 2021-08-10 |
| 11062922 | Substrate liquid processing apparatus | Takashi Nagai, Hideaki Sato, Hiromi Hara, Hiroshi Yoshida | 2021-07-13 |