Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11087992 | Substrate processing method and substrate processing apparatus | Tsukasa Hirayama, Takao Inada, Kazuya Koyama, Hisashi Kawano | 2021-08-10 |
| 11075096 | Substrate processing apparatus | Takao Inada, Hisashi Kawano | 2021-07-27 |
| 10928732 | Substrate liquid processing apparatus, substrate liquid processing method, and storage medium | Takafumi Tsuchiya, Koichiro Kanzaki | 2021-02-23 |
| 10916456 | Substrate liquid processing apparatus and substrate liquid processing method | — | 2021-02-09 |