Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11062922 | Substrate liquid processing apparatus | Takashi Nagai, Hideaki Sato, Hiroshi Yoshida, Tsukasa Hirayama | 2021-07-13 |
| 11056360 | Substrate liquid processing apparatus and method, and computer-redable storage medium stored with substrate liquid processing program | Hideaki Sato, Jin Hyun Kim | 2021-07-06 |
| 10985035 | Substrate liquid processing apparatus, substrate liquid processing method and computer readable recording medium having substrate liquid processing program recorded therein | Hideaki Sato, Takahiro Kawazu, Takashi Nagai | 2021-04-20 |