Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158525 | Substrate processing apparatus and substrate processing method | Yasuhiro Takaki, Shinichi Umeno, Hisashi MORITA, Nobuhiro Ogata, Yusuke Takamatsu +1 more | 2021-10-26 |
| 11062922 | Substrate liquid processing apparatus | Hideaki Sato, Hiromi Hara, Hiroshi Yoshida, Tsukasa Hirayama | 2021-07-13 |
| 10985035 | Substrate liquid processing apparatus, substrate liquid processing method and computer readable recording medium having substrate liquid processing program recorded therein | Hiromi Hara, Hideaki Sato, Takahiro Kawazu | 2021-04-20 |