Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158525 | Substrate processing apparatus and substrate processing method | Yasuhiro Takaki, Shinichi Umeno, Takashi Nagai, Nobuhiro Ogata, Yusuke Takamatsu +1 more | 2021-10-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158525 | Substrate processing apparatus and substrate processing method | Yasuhiro Takaki, Shinichi Umeno, Takashi Nagai, Nobuhiro Ogata, Yusuke Takamatsu +1 more | 2021-10-26 |