Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201050 | Substrate processing method, recording medium and substrate processing apparatus | Hiromi Kiyose, Gentaro Goshi, Naohiko Hamamura, Takuro Masuzumi, Kenji Sekiguchi +2 more | 2021-12-14 |
| 10998183 | Substrate cleaning apparatus, substrate cleaning system, substrate cleaning method and memory medium | Miyako Kaneko, Takehiko Orii, Satoru Shimura, Masami Yamashita | 2021-05-04 |