Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189498 | Method of etching silicon-containing film, computer-readable storage medium, and apparatus for etching silicon-containing film | Yasuo ASADA, Jun LIN, Ayano HAGIWARA, Shinji Irie, Kenji Tanouchi +1 more | 2021-11-30 |
| 11011383 | Etching method | Yasuo ASADA, Nobuhiro Takahashi | 2021-05-18 |
| 10998183 | Substrate cleaning apparatus, substrate cleaning system, substrate cleaning method and memory medium | Miyako Kaneko, Satoru Shimura, Masami Yamashita, Itaru Kanno | 2021-05-04 |