Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10998183 | Substrate cleaning apparatus, substrate cleaning system, substrate cleaning method and memory medium | Takehiko Orii, Satoru Shimura, Masami Yamashita, Itaru Kanno | 2021-05-04 |