Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189498 | Method of etching silicon-containing film, computer-readable storage medium, and apparatus for etching silicon-containing film | Takehiko Orii, Yasuo ASADA, Ayano HAGIWARA, Shinji Irie, Kenji Tanouchi +1 more | 2021-11-30 |
| 10998199 | Etching method and etching apparatus | Susumu YAMAUCHI | 2021-05-04 |