Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211281 | Substrate processing apparatus and substrate processing method | — | 2021-12-28 |
| 11201050 | Substrate processing method, recording medium and substrate processing apparatus | Itaru Kanno, Hiromi Kiyose, Gentaro Goshi, Naohiko Hamamura, Takuro Masuzumi +2 more | 2021-12-14 |
| 11049723 | Substrate processing method and substrate processing apparatus | Koukichi Hiroshiro, Rintaro Higuchi, Koji Kagawa | 2021-06-29 |