Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049723 | Substrate processing method and substrate processing apparatus | Koukichi Hiroshiro, Rintaro Higuchi, Kenji Sekiguchi | 2021-06-29 |
| 10985026 | Substrate processing method, substrate processing apparatus, and substrate processing system | — | 2021-04-20 |