Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133176 | Substrate processing method, recording medium and substrate processing system | Kento Tsukano, Gentaro Goshi, Takuro Masuzumi, Hiromi Kiyose | 2021-09-28 |
| 11084072 | Substrate processing apparatus, substrate processing method and recording medium | Noritaka Uchida, Takanori Obaru, Hidetaka Shinohara, Shuuichi Nishikido, Tomohito Ura +1 more | 2021-08-10 |