Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139182 | Substrate processing apparatus and substrate processing method | Nobuhiko Mouri, Yasushi Takiguchi, Teruhiko Kodama | 2021-10-05 |
| 11084072 | Substrate processing apparatus, substrate processing method and recording medium | Shogo Fukui, Noritaka Uchida, Hidetaka Shinohara, Shuuichi Nishikido, Tomohito Ura +1 more | 2021-08-10 |