Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139182 | Substrate processing apparatus and substrate processing method | Nobuhiko Mouri, Takanori Obaru, Yasushi Takiguchi | 2021-10-05 |
| 11126086 | Substrate treatment apparatus, substrate treatment method, and computer storage medium | Koichi Matsunaga | 2021-09-21 |