Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139182 | Substrate processing apparatus and substrate processing method | Nobuhiko Mouri, Takanori Obaru, Teruhiko Kodama | 2021-10-05 |
| 11059145 | Dressing apparatus and dressing method for substrate rear surface polishing member | Yoshiki Okamoto, Akihiro Kubo, Hayato Hosaka, Ryuto Ozasa | 2021-07-13 |
| 11031261 | Liquid processing apparatus | Koki Yoshimura, Taro Yamamoto, Hideharu Kyouda, Koshi MUTA | 2021-06-08 |