AK

Akihiro Kubo

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
Overall (2021): #542,161 of 548,734Top 100%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11059145 Dressing apparatus and dressing method for substrate rear surface polishing member Yoshiki Okamoto, Yasushi Takiguchi, Hayato Hosaka, Ryuto Ozasa 2021-07-13