KM

Koshi MUTA

TL Tokyo Electron Limited: 2 patents #116 of 787Top 15%
Overall (2021): #139,986 of 548,734Top 30%
2
Patents 2021

Issued Patents 2021

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11031261 Liquid processing apparatus Yasushi Takiguchi, Koki Yoshimura, Taro Yamamoto, Hideharu Kyouda 2021-06-08
10921713 Developing method, computer-readable storage medium and developing apparatus Hideharu Kyoda, Minoru Kubota 2021-02-16