Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211241 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda +2 more | 2021-12-28 |
TK
Takafumi KINUTA
Screen Holdings Co.: 1 patents #87 of 184Top 50%
Overall (2021): #242,026 of 548,734Top 45%
1
Patents 2021