Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211241 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda +2 more | 2021-12-28 |
| 11169443 | Gap filling composition and pattern forming method using low molecular weight compound | Xiaowei Wang | 2021-11-09 |
| 11156920 | Lithography composition, a method for forming resist patterns and a method for making semiconductor devices | Kazuma Yamamoto, Maki ISHII, Tomoyasu YASHIMA | 2021-10-26 |