| 11204547 |
Pellicle support frame, pellicle, method for manufacturing pellicle support frame, and exposure original plate and exposure device employing pellicle |
Akira Ishikawa, Atsushi Okubo, Kazuo Kohmura |
2021-12-21 |
| 11137677 |
Pellicle, exposure original plate, exposure device, and semiconductor device manufacturing method |
Kazuo Kohmura, Atsushi Okubo, Daiki Taneichi, Hisako ISHIKAWA, Tsuneaki Biyajima |
2021-10-05 |
| 11042085 |
Pellicle film, pellicle frame, pellicle, method for producing same, original plate for light exposure, light exposure apparatus and method for manufacturing semiconductor device |
Atsushi Okubo, Kazuo Kohmura, Atsuko Sekiguchi, Yuichi Kato, Takeo Yamada |
2021-06-22 |
| 10895805 |
Pellicle manufacturing method and method for manufacturing photomask with pellicle |
Kazuo Kohmura, Daiki Taneichi, Hisako ISHIKAWA, Tsuneaki Biyajima, Yasuyuki Sato +1 more |
2021-01-19 |