Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11204547 | Pellicle support frame, pellicle, method for manufacturing pellicle support frame, and exposure original plate and exposure device employing pellicle | Akira Ishikawa, Atsushi Okubo, Yosuke Ono | 2021-12-21 |
| 11137677 | Pellicle, exposure original plate, exposure device, and semiconductor device manufacturing method | Yosuke Ono, Atsushi Okubo, Daiki Taneichi, Hisako ISHIKAWA, Tsuneaki Biyajima | 2021-10-05 |
| 11042085 | Pellicle film, pellicle frame, pellicle, method for producing same, original plate for light exposure, light exposure apparatus and method for manufacturing semiconductor device | Yosuke Ono, Atsushi Okubo, Atsuko Sekiguchi, Yuichi Kato, Takeo Yamada | 2021-06-22 |
| 10988647 | Semiconductor substrate manufacturing method, semiconductor device, and method for manufacturing same | Jun Kamada, Kaichiro Haruta, Takashi UNEZAKI, Kiyomi Imagawa, Kenichi Fujii +1 more | 2021-04-27 |
| 10955740 | Pellicle frame and pellicle | Yoshihiro Taguchi, Daiki Taneichi | 2021-03-23 |
| 10895805 | Pellicle manufacturing method and method for manufacturing photomask with pellicle | Daiki Taneichi, Yosuke Ono, Hisako ISHIKAWA, Tsuneaki Biyajima, Yasuyuki Sato +1 more | 2021-01-19 |