Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11042085 | Pellicle film, pellicle frame, pellicle, method for producing same, original plate for light exposure, light exposure apparatus and method for manufacturing semiconductor device | Yosuke Ono, Atsushi Okubo, Kazuo Kohmura, Yuichi Kato, Takeo Yamada | 2021-06-22 |