Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11042085 | Pellicle film, pellicle frame, pellicle, method for producing same, original plate for light exposure, light exposure apparatus and method for manufacturing semiconductor device | Yosuke Ono, Atsushi Okubo, Kazuo Kohmura, Atsuko Sekiguchi, Takeo Yamada | 2021-06-22 |
| 10975930 | Method for filling liquid into liquid-filled rubber and deaerator for liquid | Akio Takashina | 2021-04-13 |
| 10957722 | Method of manufacturing flexible device using multidirectional oblique irradiation of an interface between a support substrate and a flexible substrate | Tomoatsu Kinoshita, Takashige Fujimori | 2021-03-23 |
| 10924698 | Solid-state imaging element, method of driving the same, and camera system | Yoshikazu Nitta, Noriyuki Fukushima, Takashi Suenaga, Toshiyuki Sugita | 2021-02-16 |