Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11137677 | Pellicle, exposure original plate, exposure device, and semiconductor device manufacturing method | Kazuo Kohmura, Yosuke Ono, Atsushi Okubo, Daiki Taneichi, Hisako ISHIKAWA | 2021-10-05 |
| 10895805 | Pellicle manufacturing method and method for manufacturing photomask with pellicle | Kazuo Kohmura, Daiki Taneichi, Yosuke Ono, Hisako ISHIKAWA, Yasuyuki Sato +1 more | 2021-01-19 |