Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11204547 | Pellicle support frame, pellicle, method for manufacturing pellicle support frame, and exposure original plate and exposure device employing pellicle | Atsushi Okubo, Yosuke Ono, Kazuo Kohmura | 2021-12-21 |
| 11133203 | Plasma processing apparatus | Satoshi Suzuki | 2021-09-28 |
| 11049780 | Electronic module and method for manufacturing same | Osamu Watanuki, Kenichi Honda, Orie Shinohara, Tsutomu Ishikawa | 2021-06-29 |
| 10924451 | Communication device, control method of communication device, and storage medium | — | 2021-02-16 |
| 10910252 | Plasma processing apparatus | Yasuharu Sasaki, Ryo CHIBA | 2021-02-02 |