Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133759 | Electrostatic chuck, substrate processing apparatus, and substrate holding method | — | 2021-09-28 |
| 11037815 | Dechuck control method and plasma processing apparatus | Katsunori Hirai, Junichi Sasaki | 2021-06-15 |
| 11004717 | Plasma processing apparatus and plasma processing method | Shoichiro Matsuyama, Daiki Satoh, Takashi Nishijima, Jinyoung Park | 2021-05-11 |
| 10910252 | Plasma processing apparatus | Akira Ishikawa, Ryo CHIBA | 2021-02-02 |
| 10886108 | Power feed structure and plasma processing apparatus | Yohei Uchida | 2021-01-05 |