SM

Shoichiro Matsuyama

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
📍 Rifu, JP: #123 of 314 inventorsTop 40%
Overall (2021): #262,033 of 548,734Top 50%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11004717 Plasma processing apparatus and plasma processing method Daiki Satoh, Yasuharu Sasaki, Takashi Nishijima, Jinyoung Park 2021-05-11