Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11101136 | Process window widening using coated parts in plasma etch processes | Dongqing Yang, Peter M. Hillman, Lala Zhu, Nitin K. Ingle, Dmitry Lubomirsky +2 more | 2021-08-24 |
| 10920319 | Ceramic showerheads with conductive electrodes | Laksheswar Kalita, Soonam Park, Dmitry Lubomirsky, LokKee Loh, Saravjeet Singh +1 more | 2021-02-16 |