Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11106141 | Optimizing a sequence of processes for manufacturing of product units | Jochem Sebastiaan Wildenberg, Marinus Jochemsen, Erik Weber Jensen, Erik Johannes Maria Wallerbos, Cornelis Johannes Rijnierse +2 more | 2021-08-31 |
| 11086305 | Determining a correction to a process | Sarathi ROY, Edo Maria Hulsebos, Junru RUAN | 2021-08-10 |
| 10928737 | Method for characterizing distortions in a lithographic process, lithographic apparatus, lithographic cell and computer program | Everhardus Cornelis Mos, Jochem Sebastiaan Wildenberg, Erik Johannes Maria Wallerbos | 2021-02-23 |
| 10884345 | Calibration method for a lithographic apparatus | Emil Peter Schmitt-Weaver, Jens Stäcker, Koenraad Remi André Maria Schreel | 2021-01-05 |