Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152489 | Additive core subtractive liner for metal cut etch processes | Ruqiang Bao, Kisup Chung, Andrew M. Greene, Sivananda K. Kanakasabapathy, David L. Rath +1 more | 2021-10-19 |
| 11121317 | Low resistance crosspoint architecture | Patrick M. Flynn, Josiah Jebaraj Johnley Muthuraj, Efe Sinan Ege, Kevin Lee Baker, Tao Nguyen +1 more | 2021-09-14 |
| 11075281 | Additive core subtractive liner for metal cut etch processes | Ruqiang Bao, Kisup Chung, Andrew M. Greene, Sivananda K. Kanakasabapathy, David L. Rath +1 more | 2021-07-27 |
| 11056391 | Subtractive vFET process flow with replacement metal gate and metallic source/drain | Hari V. Mallela, Robert R. Robison, Reinaldo Vega | 2021-07-06 |
| 11024709 | Vertical fin field effect transistor with air gap spacers | Hari V. Mallela, Robert R. Robison, Reinaldo Vega | 2021-06-01 |
| 10998314 | Gate cut with integrated etch stop layer | Marc A. Bergendahl, Andrew M. Greene | 2021-05-04 |
| 10957603 | Vertical FET devices with multiple channel lengths | Hari V. Mallela, Reinaldo Vega | 2021-03-23 |