Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107674 | Methods for depositing silicon nitride | Mark Saly, Praket P. Jha, Jingmei Liang | 2021-08-31 |
| 10985009 | Methods to deposit flowable (gap-fill) carbon containing films using various plasma sources | Mark Saly, David Thompson, William J. Durand, Kelvin Chan, Hanhong Chen +1 more | 2021-04-20 |