Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11118263 | Method for forming a protective coating film for halide plasma resistance | Yogita Pareek, Emily Thomson, Mahmut Sami Kavrik, Andrew C. Kummel | 2021-09-14 |
| 11047035 | Protective yttria coating for semiconductor equipment parts | Ramesh Gopalan, Yixing Lin, Tasnuva Tabassum, Siamak Salimian, Yikai Chen | 2021-06-29 |
| 10941303 | Chemical conversion of yttria into yttrium fluoride and yttrium oxyfluoride to develop pre-seasoned corossion resistive coating for plasma components | Mats Larsson, Yogita Pareek, Jianqi Wang | 2021-03-09 |
| 10921251 | Chamber component part wear indicator and a system for detecting part wear | Mats Larsson | 2021-02-16 |
| 10883972 | Coating tester using gas sensors | Tasnuva Tabassum, Mats Larsson | 2021-01-05 |