Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10941303 | Chemical conversion of yttria into yttrium fluoride and yttrium oxyfluoride to develop pre-seasoned corossion resistive coating for plasma components | Yogita Pareek, Jianqi Wang, Kevin A. PAPKE | 2021-03-09 |
| 10921251 | Chamber component part wear indicator and a system for detecting part wear | Kevin A. PAPKE | 2021-02-16 |
| 10883972 | Coating tester using gas sensors | Tasnuva Tabassum, Kevin A. PAPKE | 2021-01-05 |